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Work function of doped zinc oxide films deposited by ALD | Journal of Materials Research | Cambridge Core
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Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition,Physica Status Solidi (A) - Applications and Materials Science - X-MOL
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Applications of atomic layer deposition and chemical vapor deposition for perovskite solar cells - Energy & Environmental Science (RSC Publishing)
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